- STMicroelectronics foundries is being tooled for 22FDX. // 3x 300mm -> Crolles 2 @ STM, Fab 1 @ GlobalFoundries, Fab 8 @ GlobalFoundries.
- Gate-First FUSI HKMG makes a comeback.
22FDX Metal Stack Examples;
-LP-
M1-2 -> 64nm Pitch
M3-7 -> 90nm Pitch
M8-9 -> 720nm Pitch
-HP- +// UHP Extension
M1-2 -> 64nm Pitch
M3-8 -> 90nm Pitch // UHP -> M7/M8 -> 180nm
M9-10 -> 180nm Pitch // UHP -> 320nm
M11-12 -> 720nm Pitch // UHP -> 1440nm
The BEOL is 14nm(STM)((first two layers)) + 28nm(STM)((everything beyond first two layers)) rather than just 28nm(STM)((whole stack)).
Should probably point this out as well;
FEOL is not STM's 14nm FDSOI, but STM's 14nm FDSOI plus. STM slides say 60% higher speed @ iso power with 14nm FDSOI plus over 28nm FDSOI, rather than 30% with normal ole 14nm FDSOI.
It is also a bit silly that it says FinFET-like performance, but when you check Ingenic Semi's benchmarks it is;
- w/o BB -> 200 MHz slower, 2 Hrs longer battery life.
- w/ FBB -> 200 MHz faster, 8 Hrs longer battery life.
//
http://www.ingenic.cn/en/?product/id/2.html <-- This ported down to 14nm FinFET(2.8 GHz-11 hrs) / 22FDX(2.6-13 hrs/3.0 GHz-19 hrs).