What I am reading about the High NA machines looks very promising as well. From 40 passes to less than 10 for 18A samples. Of course, it is possible (highly likely) that to achieve more density than 18A, 14A will have way more than 10 passes.... but it might be worth it.That's what Novalake is for, brother.
Still, it is things like this that Intel NEEDS to think about. Having fewer passes to achieve a wafer results in higher throughput .... and that aint nothin!