Of the list, Jersey Mike's by miles. Larry's, if it were on there.
Subway used to be OK, but they've gone downhill over the last several years. The restaurants and the food even smell repulsive, now. When a subway nearby bakes their bread, it reminds me of tupperware burning.
Blimpie also has gone downhill, and did so much sooner than Subway.
Quiznos is like Taco Bell: choose your order right, and you can get filled up pretty cheaply, on OK stuff. Quiznos is not high quality, but I don't feel sick being in a Quiznos, smelling the food, or eating the food, so it's got something over Subway. I'm guessing the regional management around Chicago just sucks, based on Zinfamous' posts, because in the SE, I've yet to go into a Quiznos that was not clean, orderly, friendly, etc.. My only problem with Quiznos if that I'm in that kind of mood, I'm usually just as close to a good local Greek or Mexican joint, so don't bother.
Firehouse is OK, but everything is too sweet and bland, and like Quiznos, they want to go cook everything over again.
I've only been to a Jimmy Johns and a Lenny's once, as they aren't nearby, either, so no real opinion. I'd never even heard of Togo's or Potbelly, before now, and apparently have neither anywhere near me.