Williamette. Original P4, 256k cache, 180nm. They were pretty slow, and ran a bit warm as well, not as bad as prescott. Generaly the higher end P3's peformed better than williamette did. Socket 423 and 478 variations.
Northwood: 130nm, 512kb cache, 400, 533, and 800mhz FSB variants. 800mhz FSB versions, and the 3.06ghz 533mhz FSB chip have hyperthreading. Socket 423 and 478 variations.
Prescott: 90nm, 1mb and 2mb cache versions. Mainly 800mhz FSB with hyperthreading. 5xx series has 1mb cache, no 64bit(there are some 5xxj's which have execute disable, and some rare 5x1's that have 64bit). 6xx has 2mb cache, and 64bit. There are a few 5xx series, with no Hyperthreading that run on 533mhz FSB. Prescott had enhancements to hyperthreading, and SSE3 added. Also increased pipeline, they run pretty hot, and clock for clock, are a bit slower than northwood due to the increased pipeline length, and while they have more cache, the cache is slower than northwoods. Socket 478 and LGA775 variations.
Cedar Mill: 65nm, die shrunk prescott, 6x1 series. 2mb cache, 64bit, some have vanderpool(virtualization) I believe. Run cooler than prescott by a decent amount, and have been known to overclock well. LGA775 only.