On June the 10th there will be combined presentation of IBM, Samsung,
ST, GF and UMC at
VLSI-2014.
A 10nm Platform Technology for Low Power and High Performance
Application Featuring FINFET Devices with Multi Workfunction
Gate Stack on Bulk and SOI
,
K.I. Seo*, B. Haran, D. Gupta, D. Guo, T.Standaert, R. Xie
***, H. Shang, E. Alptekin, D.- I. Bae*, G. Bae*, C. Boye,
H. Cai***, D. Chanemougame**, R. Chao, J. Cho***, B. Hamieh**
, J.G. Hong*, T. Hook, L. Jang***, J. Jung*, R. Jung, D. Lee*
, B. Lherron**, R. K ambhampati***, B. Kim*, H. Kim***, K. Kim*
, T.S. Kim*, S.-B. Ko, F.L. Lie, D. Liu, H. Mallela, E.Mclellan,
S. Mehta, P. Montanini**, M. Mottura**, J. Nam, S. Nam***,
F. Nelson, I. Ok, C. Park***, Y.Park*, A. Paul***, C. Prindle***
, R. Ramachandran, M. Sankarapandian, V. Sardesai, A. Scholze,
S.-C.Seo, J. Shearer, R. Southwick, S. Stieg, J. Strane, X. Sun,
M.G. Sung***, S. Surisetty, G. Tsutsui, N.Tripathi***, R. Vega,
C. Waskiewicz, M. Weybright, C.-C. Yeh, H. Bu, S. Burns,
D. Canaperi, M. Celik**, M.Colburn, H. Jagannathan,
S. Kanakasabaphthy, W. Kleemeier**, L. Liebman, D. Mcherron,
P. Oldiges, V.Paruchuri, T. Spooner, J. Stathis, R. Divakaruni,
T. Gow, J. Iacoponi***, J. Jenq^, R. Sampson**, M. Khare,
IBM Microelectronics, *Samsung Electronics,**STMicroelectronics,
***GLOBALFOUNDRIES, ^UMC
A 10nm logic platform technology is presented for low power and high
performance application with the tightest contacted poly pitch (CPP)
of 64nm and metallization pitch of 48nm ever reported in the FinFET
technology on both bulk and SOI substrate. A 0.053μm2 SRAM bit-cell
is reported with a corresponding Static Noise Margin (SNM) of 140mV
at 0.75V. Intensive multi-patterning technology and various self-
aligned processes have been developed with 193i lithography to over-
come optical patterning limit. Multi-work function (WF) gate stack
has been enabled to provide Vt tunability without the variability
degradation induced by channel dopants.