Lithography is making up an an even greater % of the cost as the wafer size increases (due to the field size remaining constant, resulting in an increase in exposure time as the wafer area increases.)
That is an excellent article. Honestly it deserves its own thread.
The economics of lithography has always been the rate limiting step for the shrink rate of each node. I got started with the 500nm (0.5um) node and it was the case then as it is now.
Even with 0.5um, when you built your fab you had to vibration isolate the steppers by building special steel pillars that were not connected to the fab itself, the pillars went to bedrock and floated unconnected to the rest of the fab shell.
The expense of just preparing the fab for the litho equipment was a dominant cost factor in building the fab shell, let alone the cost of the litho equipment.
The problem though is as CTho9305 mentioned in the other thread. 450mm is a cost-reduction enabler, not a performance/scaling enabler. 450mm does not make your xtors any faster, it does not make the leakage any less, it does not decrease your center-to-edge non-uniformity's, etc.
At best it makes your current CPU cost less to manufacture. So Intel's expense goes from $35 per CPU to $25 per CPU. But your CPU is still going to cost you $300, and it isn't going to clock any faster or run any cooler.
And that is the problem with litho, litho doesn't make anything run faster or cooler. It shrinks it so it costs less to produce and that is all litho does for you.
To make the chips run faster, use less power, perform better, you need the rest of the materials science to come to bear. You need the design engineers to design cleverer circuits, you need the process engineers to design better functioning transistors and better conducting wires, etc.
None of that is addressed by billion dollar EUV tools or 450mm wafers. But the industry does not live by cutting costs, it lives by selling chips to consumers. And those consumers have no need to buy a chip just because it is cheaper to manufacture. Consumers will only buy the chip if it is faster or uses less power.
So EUV and 450mm are sexy topics for journals and articles, but the blue smoke that needs to be injected into 11nm chips to make them sellable and desirable has little to do with either of those topics.