Ion Implantation: Book Recommendations?

[Sho'Nuff]

Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

 

[TuxDave]

Originally posted by: soxfan
Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

Are we talking ion-implantation for semiconductor fabrication or some other context of ion implantation? I have a textbook (back home) that covers semiconductor fabrication and it's good and cheap (soft cover). I don't quite remember the name but I'll get it once I go home. It was the textbook used at Rutgers for the microfabrication class.

Edit: Just got home. So the book is titled: Introduction to Microelectronic Fabrication I'm not a big device physics guy but this book worked for me.

 

[Stiganator]

Are you talking about surface modifications of metals, polymers to change physical properties?

 

[Special K]

Originally posted by: TuxDave

Originally posted by: soxfan
Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

Are we talking ion-implantation for semiconductor fabrication or some other context of ion implantation? I have a textbook (back home) that covers semiconductor fabrication and it's good and cheap (soft cover). I don't quite remember the name but I'll get it once I go home. It was the textbook used at Rutgers for the microfabrication class.

Edit: Just got home. So the book is titled: Introduction to Microelectronic Fabrication I'm not a big device physics guy but this book worked for me.

I also own the book TuxDave linked to. I am not an expert, but I felt the book was good for the devices course in which it was used.

 

[CanOWorms]

I also own the Introduction to Microelectronic Fabrication book, but the chapter on Ion Implantation is only about 20 pages long.

 

[TuxDave]

Good to know I have a popular book

 

[Sho'Nuff]

Originally posted by: TuxDave

Originally posted by: soxfan
Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

Are we talking ion-implantation for semiconductor fabrication or some other context of ion implantation? I have a textbook (back home) that covers semiconductor fabrication and it's good and cheap (soft cover). I don't quite remember the name but I'll get it once I go home. It was the textbook used at Rutgers for the microfabrication class.

Edit: Just got home. So the book is titled: Introduction to Microelectronic Fabrication I'm not a big device physics guy but this book worked for me.

Sorry, I should have been more specific. I'm looking for a text discussing ion implantation as it relates to semiconductor wafer fabrication.

 

[Special K]

Originally posted by: soxfan

Originally posted by: TuxDave

Originally posted by: soxfan
Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

Are we talking ion-implantation for semiconductor fabrication or some other context of ion implantation? I have a textbook (back home) that covers semiconductor fabrication and it's good and cheap (soft cover). I don't quite remember the name but I'll get it once I go home. It was the textbook used at Rutgers for the microfabrication class.

Edit: Just got home. So the book is titled: Introduction to Microelectronic Fabrication I'm not a big device physics guy but this book worked for me.

Sorry, I should have been more specific. I'm looking for a text discussing ion implantation as it relates to semiconductor wafer fabrication.

So then what's wrong with the book we linked you to?

 

[theeedude]

http://www.amazon.com/Silicon-...ctronics/dp/0130850373
"Silicon VLSI Technology"
That's book we used in my class.

 

[Eskimo]

The book that senseamp linked by Plummer is a great overall text that includes a section on Ion Implantation. Stanley Wolf's series of books on Silicon Processing are also good and I used them back when I was a student. His latest volume: Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology covers some of the advanced impant techniques we use in industry today (Supersteep retrograde, Channel Stop, HALO, etc). The paperback texts that TuxDave and Special K mentioned are good for learning to hand calculate projected range and straggle of beam. I have copies of them as well.

James Ziegler has a book, Ion Implantation - Science and Technology. Dr. Ziegler was the head of Radiation Sciences at IBM for 25 years and is probably one of the best authorities on the subject. I haven't read the book but it would probably be worth checking out. He also has a website from which you can download his software program SRIM. It's pretty cool little utility to simulate implanting different species into different materials. Used to be available off of IBM's website but now he has his own. http://www.srim.org (the guy is old so forgive the horrible website design)

Do you work in industry or are you a student? If the former I would get in touch with Varian or Axcelis or which ever vendor your company uses as they have a lot of useful training material as well.

 

[adhemp]

My undergrad text was "The Science and Engineering of Microelectronic Fabrication", by S. Campbell. I thought it was pretty good. It gave a good overview of how different systems and tools in the semiconductor fabrication process work conceptually (including ion implanters). To be honest, I never paid too much attention to the hand calculation parts...I'll leave the specific details to the guys in the fab

 

[Sho'Nuff]

Originally posted by: Special K

Originally posted by: soxfan

Originally posted by: TuxDave

Originally posted by: soxfan
Ok, so a book request is not really highly technical, but given the subject matter, I do not know where else I should post this. In essence, I am looking for a good text that focuses on the ins and outs of ion implantation. Any recommendations are appreciated.

And yes, I have googled for this, and the few books that come up are unreviewed.

Are we talking ion-implantation for semiconductor fabrication or some other context of ion implantation? I have a textbook (back home) that covers semiconductor fabrication and it's good and cheap (soft cover). I don't quite remember the name but I'll get it once I go home. It was the textbook used at Rutgers for the microfabrication class.

Edit: Just got home. So the book is titled: Introduction to Microelectronic Fabrication I'm not a big device physics guy but this book worked for me.

Sorry, I should have been more specific. I'm looking for a text discussing ion implantation as it relates to semiconductor wafer fabrication.

So then what's wrong with the book we linked you to?

Nothing. I was just answering tuxdave's question.

 

[Sho'Nuff]

Originally posted by: Eskimo
Do you work in industry or are you a student? If the former I would get in touch with Varian or Axcelis or which ever vendor your company uses as they have a lot of useful training material as well.

Neither, I am a patent lawyer. I do a lot of application drafting for semiconductor manufacturing processes (thin film depo and lithography in particular), and a client wanted to know whether or not I could handle some ion implantation work as well. I indicated that I could probably take it on, but that I would probably need a bit of a technology refresher first. Hence why I am asking for book recommendations. I still have a general understanding of the technology based on my undergrad studies (which ended almost 10 years ago), but I really have not kept up to date with the latest and greatest developments.