[Extremetech]TSMC announces lithography milestone as EUV moves closer to production

ShintaiDK

Lifer
Apr 22, 2012
20,378
146
106
EUV have been around the corner since....close to forever. Its the holy grail specially for smaller companies and will enable lower transistor cost past 28nm for fabless.
 

witeken

Diamond Member
Dec 25, 2013
3,899
193
106
EUV won't be used for 10nm, at least not initially, so still a few years out.
 

DrMrLordX

Lifer
Apr 27, 2000
23,222
13,300
136
With all the noise Samsung is making about their process advancements, perhaps TSMC felt they needed to toot their own horn. Or something.
 

Xpage

Senior member
Jun 22, 2005
459
15
81
www.riseofkingdoms.com
nothing is told about the quality of light from the sources and how good the exposures are. Just says 1000 wafers @ 90W.

I will be impressed if they have 125W or higher power sources as that is the main limiting factor. More W is better. Also curious how the resolved the secondary electrons being generated after hitting the silicon.