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[Extremetech]TSMC announces lithography milestone as EUV moves closer to production

EUV have been around the corner since....close to forever. Its the holy grail specially for smaller companies and will enable lower transistor cost past 28nm for fabless.
 
With all the noise Samsung is making about their process advancements, perhaps TSMC felt they needed to toot their own horn. Or something.
 
nothing is told about the quality of light from the sources and how good the exposures are. Just says 1000 wafers @ 90W.

I will be impressed if they have 125W or higher power sources as that is the main limiting factor. More W is better. Also curious how the resolved the secondary electrons being generated after hitting the silicon.
 
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