- Dec 25, 2013
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Samsung SRAM size of 0.030um^2
From the 'earlier this year' link:
It's not clear of the reported 0.030um^2 number is the high density or low density cell, but it's a bit meager given that Samsung will indeed not bother with immersion after the 10nm node.
The normal density and high density numbers of Samsung 10nm are:
0.049 / 0.040
If the 0.030 is the normal density cell, then that is a 1.63x shrink from 10nm.
You can read the article for more of the presentations that will be given at next year's ISSCC, but there will be no 3D XPoint one.
In a sign of the status of the underlying process technology, TSMC will unveil what organizers called “the smallest SRAM bit cell published to date.” The 0.027μm2 256 Mbit SRAM is made in a 7nm FinFET process using write-assist circuitry for low Vmin applications.
The Taiwan foundry’s rival, Samsung, will not be far behind with a 7nm FinFET SRAM less than 0.030μm2 in area. Interestingly, the part is made using extreme ultraviolet lithography for peripheral repair analysis, an approach said to improve Vmin by 39.9 mV based on failure analysis.
Samsung announced earlier this year it plans to put EUV steppers into production earlier than rivals, in part because it is testing them in both logic and memory fabs. TSMC has said it will wait for 5nm before inserting EUV.
From the 'earlier this year' link:
As part of the news Samsung revealed it will skip the 7nm node with immersion lithography planned by rivals TSMC and Globalfoundries. Instead it aims to have in production a 7nm process with extreme ultraviolet lithography in late 2018
It's not clear of the reported 0.030um^2 number is the high density or low density cell, but it's a bit meager given that Samsung will indeed not bother with immersion after the 10nm node.
The normal density and high density numbers of Samsung 10nm are:
0.049 / 0.040
If the 0.030 is the normal density cell, then that is a 1.63x shrink from 10nm.
You can read the article for more of the presentations that will be given at next year's ISSCC, but there will be no 3D XPoint one.