ASML will deliver 15 EUV systems to Intel

[witeken]

ASML reaches agreement for delivery of minimum of 15 EUV lithography systems

VELDHOVEN, the Netherlands, 22 April 2015 - ASML Holding NV (ASML) today announces that it has signed an agreement with one of its major US customers to deliver a minimum of 15 ASML EUV lithography systems to support increased development activity and pilot production of future-generation manufacturing processes. The customer intends to use EUV lithography for multiple processing steps in future process technology nodes. The delivery of the first two NXE:3350B EUV systems is expected before the end of 2015. The new systems will be in addition to the existing EUV development systems already at the customer. Financial terms were not disclosed.

I only know one US company that could use 15 of these EUV systems, so it's Intel . Will probably be used for 7nm. Seems EUV's getting mature if we're talking about this many $XX millions systems.

 

[ShintaiDK]

Just shows how far away EUV keeps being. And its a huge problem for the cost oriented part of the industry.

 

[khon]

Just shows how far away EUV keeps being. And its a huge problem for the cost oriented part of the industry.

What it shows is that EUV will become reality. You don't buy 15 systems to do research and development, 15 systems means mass production. And if Intel is going to EUV, other logic companies (tsmc and Samsung) will be forced to follow.

 

[ShintaiDK]

What it shows is that EUV will become reality. You don't buy 15 systems to do research and development, 15 systems means mass production. And if Intel is going to EUV, other logic companies (tsmc and Samsung) will be forced to follow.

Oh I agree, but from the looks of it we are deep into 2017 or even 2018+

 

[NTMBK]

I only know one US company that could use 15 of these EUV systems, so it's Intel .

GloFo has US fabs too, to be fair. But yeah, probably Intel.

It's about damn time. Roll on the EUV!

 

[seitur]

Oh I agree, but from the looks of it we are deep into 2017 or even 2018+

IDC any comment on timetable of EUV?

I would be interested to hear your opinion.

 

[Arachnotronic]

GloFo has US fabs too, to be fair. But yeah, probably Intel.

It's about damn time. Roll on the EUV!

If GloFo's previous roadmaps were to believed, they might need EUV for...erm...its 10XM node?

 

[Fred B]

GloFo has US fabs too, to be fair. But yeah, probably Intel.

It's about damn time. Roll on the EUV!

Intel already invested in 2012 in ASML for enhanced development , and a share of ASML today is EUR. 101,30 :hmm:

http://asml.com/asml/show.do?lang=EN&ctx=5869&rid=46711

quote

Intel is the first participant in the customer co-investment program, and has committed to acquire up to a 15% equity ownership interest at a subscription price of EUR 39.91 per share1, and to also provide EUR 829 million to ASML in R&D funding, which will be dedicated to the development of 450 mm and EUV technology.

 

[krumme]

Those 3350B is that old depreciated Samsung stuff? /sarcasm

 

[krumme]

What it shows is that EUV will become reality. You don't buy 15 systems to do research and development, 15 systems means mass production. And if Intel is going to EUV, other logic companies (tsmc and Samsung) will be forced to follow.

Forced to follow?
I hope you are right but I think you got it backwards.
I read this as Intels yield of 10nm without euv is having a serious bad time. My guess is Samsung will go euv first as indicated earlier on their 10nm midnode.

 

[ShintaiDK]

Everyone wants to go EUV, its just a matter of when they can. EUV will be a large cost saving on the chips produced. Same reason why so many are stuck at 28nm cost wise.

 

[soccerballtux]

Those 3350B is that old depreciated Samsung stuff? /sarcasm

lol

 

[soccerballtux]

Everyone wants to go EUV, its just a matter of when they can. EUV will be a large cost saving on the chips produced. Same reason why so many are stuck at 28nm cost wise.

I'm sorry but do you know what you're talking about? Shrinking nodes is always a cost savings

 

[Guest1]

I'm sorry but do you know what you're talking about? Shrinking nodes is always a cost savings

You obviously don't.

http://www.soitec.com/pdf/WP_handel-jones.pdf

The only company that has made costs go down is Intel at 14nm. All others have seen their costs go up since they have not produced a true shrink. Couple that with low yield issues such as the case with GloFo = disaster.

http://www.anandtech.com/show/8367/intels-14nm-technology-in-detail

 

[ShintaiDK]

I'm sorry but do you know what you're talking about? Shrinking nodes is always a cost savings

No its not.

Welcome to the world of multiple patterning as a requirement.

 

[Idontcare]

IDC any comment on timetable of EUV?

I would be interested to hear your opinion.

Assuming these are headed to Intel, and that seems to be a logical assumption given the wording of the press release, then Intel would be targeting the 7nm node for production insertion, which could very well push the timetable to 2H 2018.

The thing to note is they only make specific reference to two tools being delivered by the end of this year (2015). That is R&D numbers, not pilot-line production numbers. 7nm development timeline would make use of those two tools this year, and Intel wouldn't need to take delivery of the remaining 13 machines until early 2017.

 

[ThatBuzzkiller]

So I imagine that the NXE:3350B has an output of at least 100 wafers per hour to make HVM worthwhile ...

This is good news for IDMs in general since their customers have now gained back the original reason to continue moore's law but EUV is STILL very much a temporary solution the problem ...

A half pitch of 14nm can now be realized with just single patterning however double patterning will be required for 7nm!

Hopefully ASML can find a way to extend EUV to a wavelength of 6.7nm ...

 

[Phynaz]

Nope, at least not at TSMC.

EUV
TSMC has upgraded two NXE 3300s from ASML to 80 watts of EUV power with an average throughput of a few hundred wafers per day, Mark Liu said.

“One-day performance has been up to 1000 wafers per day, but the average is still a few hundred,” Liu said. “We need to get up to 1,000 per day before we will consider putting it into our schedule for production.”