Antireflective coatings

[Qacer]

Hey all,

I have to write a paper regarding antireflective coatings (TARC / BARC). I was hoping for someone to point me to some references that can shed some light on their origin. I've search through my available resources (IEEE Xplore & ScienceDirect). The paper is supposed to be setup like a reference page from a VLSI book. I have a feeling my professor is trying to cash in on student papers. j/k

Thanks!

 

[Mday]

Originally posted by: Qacer
Hey all,

I have to write a paper regarding antireflective coatings (TARC / BARC). I was hoping for someone to point me to some references that can shed some light on their origin. I've search through my available resources (IEEE Xplore & ScienceDirect). The paper is supposed to be setup like a reference page from a VLSI book. I have a feeling my professor is trying to cash in on student papers. j/k

Thanks!

google it, anything you find on HTML pages, etc., are noted in the APA style for electronic\internet references.

 

[b0z0]

Hey,

By anti-reflective coating if you mean the thing used on glass then maybe you might wanna try the meade website. www.meade.com

They make telescopes for advanced amateurs and have some kind of UHCT antireflective coatings as an additional option for some of their scopes. There are some papers on the stuff on the website.

Just trying to help.

-b0z0

P.S. Mday - Bloody hell man.... 17000 posts. WOW!!! :beer:

 

[Qacer]

I always try to Google it before I ask anything.
I actually tried more searches yesterday using a manufacturer's name and got some new leads. As for anti-reflective coatings, I meant to say that it is in regards to lithographic process used in IC processing. The basic idea is that when you are trying to etch certain portions of your wafer, say, using electrons to bombard the top of the wafer then the electrons have the tendency to bounce (reflect) back to other restricted areas. An anti-reflective coating would prevent this.

 

[Qacer]

I got the info that I needed.

For those interested, I found some useful information here:

Brewer Science